September 1999

Quality Considerations in Etching of Fine Features

Quality, as many things in life, has a multitude of aspects, which can be structured hierarchically, as parallel domains or activities, or can be arranged in a chronological order. Following the chronological aspect, quality in etching could be presented as • Internal quality systems and protocols which guide the development of consumables and permanent materials used in etching operations, • Quality features of such materials, and • The quality control ofIhe etching process per se.

Karl H. Dietz, DuPont Photopolymer and Electronic Materials