Fabrication of Submicron Microfeatures on Metals by Using Modified Electrolytic Photoetching Techniques
This paper summarises the presentation given to
delegates attending the Hong Kong PCMI meeting on
4th March 2008 and was an outcome of a one-year
sabbatical (May 2007 to May 2008) by Associate
Professor “Harry” Wang to study novel etching
technologies with Professor David Allen and
Dr. Heather Almond at Cranfield University.
Currently there is a great demand for microfabrication,
especially in the fields of Aerospace, Microelectronics, Biomedicine,
Automobiles and Communications. The typical
methods used for microfabrication are shown in Table 1.
Dr. Wei Wong, Nanjing University of Aeronautics and Astronautics, China and Prof. David Allen and Dr. Heather Almond, Cranfield University, UK