Disposal and Waste Treatment Considerations for Spent Aqueous Resist Processing Effluents
Spent Resist Effluent
How can I dispose of it?
Does it contain TTO toxic organics?
Does it contain heavy metals?
Is it compatible with other process effluents?
Does it require special waste treatment?
Is it compatible with my existing waste treatment?
List of typical questions asked by knowledgeable customers.
Dr. Peter Strilko and R.F. Schwer, DuPont