Spring 1987

Disposal and Waste Treatment Considerations for Spent Aqueous Resist Processing Effluents

Spent Resist Effluent How can I dispose of it? Does it contain TTO toxic organics? Does it contain heavy metals? Is it compatible with other process effluents? Does it require special waste treatment? Is it compatible with my existing waste treatment? List of typical questions asked by knowledgeable customers.

Dr. Peter Strilko and R.F. Schwer, DuPont