Quantitative Examination of Photofabricated Profiles. Measurement of Etch Factor

January 1982

Etch factor in this series of papers is defined as the depth of etch divided by the undercut' (Fig. I). From this figure it can be seen that evaluation of etch factor requires the measurement of three quantities: (I) The width of the line (or slot) in the developed photoresist stencil, (2) The width of the slot at the metal surface after etching. (3) The depth of etching measured when etching is stopped before break-through of the metal sheet.

D.M. Allen, D.F. Horne and G.W.W. Stevens, Cranfield Institute of Technology