Fall 1991
Further Aspects of Ferric Chloride Regeneration
Etchant regeneration is the process by which “spent” etchants
are oxidised back to a reuseable form. In an etching facility, the
need to regenerate (or dispose ofand replace) an etchant, through
“contamination” by the increasing concentration of byproducts, is
typified by slower etch rates and poorer quality finishes”); both
unacceptable features in a commercial operation. Owing to the
increasing public concern for the environment, in terms of
polluting it and an awareness of using up finite resources, disposal
is becoming less desirable and, through legislation, more
restrictive and, therefore, more expensive. Regeneration is the
obvious answer to the problem, but it is advisable to be aware of
the stage at which regeneration becomes more economical than
disposal. Such aspects were addressed in an earlier work on
etchant regeneration systems”) of which this paper is effectively
an extension.
David M. Allen and Heather J.A. White, Cranfield Institute of Technology
