Process Effects Committee Report: Starburst Pattern
Fall 1986
Dr. Charles Ring, BMC Industries, and Carl Whinery, Northwest Chemical Milling
AN UPDATE: P.CM.I. started the Round Robin Testing
Program in 1982 using a starburst pattern known as the
Uniformity and Directional Processed Biased Detection Pattern.
The purpose of the testing was to compare the different etchant
delivery systems. It was found that the starburst pattern not only
was sensitive enough to pick up abnormalities in the etchant
delivery system, it also had the sensitivity to give a quick visual
check of the pre-etch process.
