Process Effects Committee Report: Starburst Pattern
Fall 1986
Dr. Charles Ring, BMC Industries, and Carl Whinery, Northwest Chemical Milling
AN UPDATE: P.CM.I. started the Round Robin Testing Program in 1982 using a starburst pattern known as the Uniformity and Directional Processed Biased Detection Pattern. The purpose of the testing was to compare the different etchant delivery systems. It was found that the starburst pattern not only was sensitive enough to pick up abnormalities in the etchant delivery system, it also had the sensitivity to give a quick visual check of the pre-etch process.
Fall 1986
Dr. Charles Ring, BMC Industries, and Carl Whinery, Northwest Chemical Milling
AN UPDATE: P.CM.I. started the Round Robin Testing Program in 1982 using a starburst pattern known as the Uniformity and Directional Processed Biased Detection Pattern. The purpose of the testing was to compare the different etchant delivery systems. It was found that the starburst pattern not only was sensitive enough to pick up abnormalities in the etchant delivery system, it also had the sensitivity to give a quick visual check of the pre-etch process.
