Development of the Application of Laser Diffraction Particle Siz

Spring 1989

Development of the Application of Laser Diffraction Particle Sizing to Etchant Sprays

The following paper was presented by Dr. David Allen at the 22nd Annual Winter PCM] Meeting, held in Anaheim, on March 6th, 1989. Saul Nasse is a Research Officer working in Dr. Allen’s group and is sponsored by the Science and Engineering Research Council to investigate spray uniformity and its characteristics. The paper is the first of a series of papers dealing with this topic.

Saul Nasse, Cranfield Institute of Technology