Fall 1997
Electrochemical Micromachining of Shape Memory Alloy Sheets
In development of micro electromechanical systems,
shape memory property has been recognized as
an excellent canddate for microactuators. Some devices
driven by shape memory alloy (SMA) actuators
such as catheters and drug delivery systems have
been investigate [1]-[3]. These devices have been
fabricated from SMA sheet and thin films as well as
wire. The increase of applications of SMA with a sheet
and a thin film structure has strengthened the importance
of developing micromachining technology.
SMA has been known as a typical hard-to-machine
material. Some researchers have applied
electrodischarge machining and laser machining for
processing SMA [4)[5]. However, from a point of view
of realisation of micro parts with complex structures
and ease of mass production of such parts, photolithographic
micromachining is important.
Eiji Makino, Takayuki Shibata, Hokkaido University, and Dr. David Allen, Cranfield University
