Experience with Ferric Chloride Regeneration

Summer 1992

Experience with Ferric Chloride Regeneration

Introduction As stated in other publications, e.g~ by David Allen (ReL I), the need for recycling our chemicals rapidly rises as the environmental regulations are tightened. In the chemical milling industry, ferric chloride is an important chemical which is used in relatively large quantities. Regeneration. therefore, is very attractive as it saves primary costs as well as waste disposal costs. Apart from the financial motives and the responsibility for the environment, there is an advantage in improved process control with continuous regeneration. Several systems are known,. for instance, the chlorine system which is used for the reel-to-reel automatic etching of shadowmasks (Ref.2).

Dr. Hans Korsee, Stork Veco BV