Laser Direct Imaging Technology

Summer 1993

Laser Direct Imaging Technology

Traditional circuit imaging uses photomasks for contact/proximity printing and reticles for projection printing onto photoresist coated substrates. By contrast, laser direct imaging accepts CAD/CAM data to write directly onto resist coated substrates employing the raster scanned laser beam without the need of pholOmasks. Laser direct imaging, although practiced for 20 years, has been inhibited by resist sensitivities, laser reliabilities, lack of CAM data, inadequate machine throughput, high costs, and machine architectures incompatible with production environments.

Donald van Amam, Polyscan Corporation