Summer 1993
Laser Direct Imaging Technology
Traditional circuit imaging uses photomasks for contact/proximity printing and reticles for projection
printing onto photoresist coated substrates. By contrast,
laser direct imaging accepts CAD/CAM data to write
directly onto resist coated substrates employing the
raster scanned laser beam
without the need of pholOmasks.
Laser direct imaging,
although practiced for 20 years, has been
inhibited by resist sensitivities,
laser reliabilities, lack of CAM
data, inadequate machine
throughput, high costs, and
machine
architectures
incompatible
with production
environments.
Donald van Amam, Polyscan Corporation
