Development of the Application of Laser Diffraction Particle Sizing to Etchant Sprays

The following paper was presented by Dr. David Allen at the 22nd Annual Winter PCM] Meeting, held in Anaheim, on March 6th, 1989. Saul Nasse is a Research Officer working in Dr. Allen’s group and is sponsored by the Science and Engineering Research Council to investigate spray uniformity and its characteristics. The paper is the first of a series of papers dealing with this topic.