Electrochemical Micromachining of Shape Memory Alloy Sheets

In development of micro electromechanical systems, shape memory property has been recognized as an excellent candidate for microactuators. Some devices driven by shape memory alloy (SMA) actuators such as catheters and drug delivery systems have been investigate [1]-[3]. These devices have been fabricated from SMA sheet and thin films as well as wire. The increase of applications of SMA with a sheet and a thin film structure has strengthened the importance of developing micromachining technology. SMA has been known as a typical hard-to-machine material. Some researchers have applied electrodischarge machining and laser machining for processing SMA [4)[5]. However, from a point of view of realization of micro parts with complex structures and ease of mass production of such parts, photolithographic micromachining is important.